Trek Model PD06078 Electrostatic Voltmeter (ESVM) is a four (4) channel voltage measuring instrument which is ideally suited to monitor critical operations associated with semiconductor, LCD, electronic assembly, and other processes where static charge accumulation poses a threat to production yields or product quality.
The Model PD06078 contains four (4) Electrostatic Voltmeters in a single enclosure. Each channel features a measurement range of 0 to ±10 kV and accuracy better than 5% reading plus ±0.2% of full scale over the probe to surface separation distance of 15 to 30 mm.
Each channel of the Model PD06078 ESVM utilizes a DC stable electrostatic field chopper probe which can be remotely located and easily positioned within process equipment to provide highly accurate, noncontacting, spacing independent, voltage measurements in either ionized or non-ionized environments.
Two types of probes are available with the Model PD06078: a side viewing type probe and a 45 degree orientation type probe. One digital panel meter display (DPM) provides monitoring of individual channels through a switchable rotary switch. A holding fixture (customer supplied) is used to position the probes sensing aperture relative to the measured surface. Trek's patented probe design significantly improves noise and drift performance, both in the presence of contaminating particulates and under conditions of high humidity and wide temperature ranges. A voltage output monitor and an 4-20 mA current loop output can provide additional signal interfacing to facility monitoring equipment.
PERFORMANCEThe Trek Model PD06078 Electrostatic voltmeter provides four (4) independent channels of accurate noncontacting measurement of electrostatic surface voltage for ESD/EOS sensitive processes in either ionized or nonionized environments. The probes are chopper stabilized for drift-free operation. For Each Individual Channel: Monitored Voltage Range Speed of Response Accuracy Drift with Time
PROBESThe probes are chopper stabilized for drift-free operation. Model 542P-45D Model 542P-S Probe Cable Length Probe-to-Surface Separation (Vacuum probes are available) |
PRODUCT FEATURESFour (4) Position Channel Switch Digital Panel Meter (DPM) ZERO Control Monitor Output Current Output Ground Connections |
GENERALDimensions Weight Power Supply Options Output Connector Operating Conditions Power ON/OFF Probe Connector Locations CERTIFICATIONTREK, INC. certifies that each Model PD06078 is tested and calibrated to specifications using measurement equipment traceable to the National Institute of Standards and Technology or traceable to consensus standards. Caution: These instruments are designed to make electrostatic voltage measurements only. Do not use these instruments to make measurements of “hard” voltage sources or voltage sources which can deliver currents high enough to cause harmful shocks or personal injury. All specifications are subject to change.
|