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Model PD06078 Four (4) Channel Electrostatic VoltMeter

Trek Model PD06078 Electrostatic Voltmeter (ESVM) is a four (4) channel voltage measuring instrument which is ideally suited to monitor critical operations associated with semiconductor, LCD, electronic assembly, and other processes where static charge accumulation poses a threat to production yields or product quality.

The Model PD06078 contains four (4) Electrostatic Voltmeters in a single enclosure. Each channel features a measurement range of 0 to ±10 kV and accuracy better than 5% reading plus ±0.2% of full scale over the probe to surface separation distance of 15 to 30 mm.

Each channel of the Model PD06078 ESVM utilizes a DC stable electrostatic field chopper probe which can be remotely located and easily positioned within process equipment to provide highly accurate, noncontacting, spacing independent, voltage measurements in either ionized or non-ionized environments.

Two types of probes are available with the Model PD06078: a side viewing type probe and a 45 degree orientation type probe. One digital panel meter display (DPM) provides monitoring of individual channels through a switchable rotary switch. A holding fixture (customer supplied) is used to position the probes sensing aperture relative to the measured surface. Trek's patented probe design significantly improves noise and drift performance, both in the presence of contaminating particulates and under conditions of high humidity and wide temperature ranges. A voltage output monitor and an 4-20 mA current loop output can provide additional signal interfacing to facility monitoring equipment.

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PERFORMANCE

• The Trek Model PD06078 Electrostatic voltmeter provides four (4) independent channels of accurate noncontacting measurement of electrostatic surface voltage for ESD/EOS sensitive processes in either ionized or nonionized environments. The probes are chopper stabilized for drift-free operation.

  For Each Individual Channel:

• Monitored Voltage Range
  0 to ±10 kV DC or peak AC.

  Speed of Response
  Less than 50 ms for a 1 kV step.

• Accuracy
  Better than ±5% of reading, ±0.2% of full scale over a probe-to-surface separation of 15 mm to 30 mm.

  Drift with Time
  Less than ±1% of full scale, noncumulative.
  

• PROBES The probes are chopper stabilized for drift-free operation.

  Model 542P-45D
  45° Orientation
  Aperture size of 3.8 mm (0.15") diameter.
  Dimensions
  11 mm dia. x 79 mm L
  (0.43" dia. x 3.1" L).

• Model 542P-S
  Side Orientation
  Aperture size of 4 mm (0.156") diameter.
  Dimensions
  13 mm dia. x 75 mm L
  (0.51" dia. x 3" L).

  Probe Cable Length
  5 meters (16 ft), nominal
  [up to 10 meters (32.8 ft)
  optional on side-view probe].

  Probe-to-Surface Separation
  15 mm to 30 mm (recommended).

• (Vacuum probes are available)

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PRODUCT FEATURES

• Four (4) Position Channel Switch
  Selects one of the four channels outputs for display on the DPM.

  Digital Panel Meter (DPM)
  3½ digit LED voltage display.
  Range
  0 to ±10.00 kV.
  Resolution
  10 V.
  Zero Offset
  Less than or equal to ±2 counts.

  ZERO Control
  (one for each channel)
  Rear panel potentiometer used to
  produce zero volts output when
  probe is coupled to a known zero
  voltage source.

  Monitor Output
  (one for each channel)
  Scale Factor
  The voltage monitor is scaled at
  1/1000th of the measured
  voltage for each channel.
  Output Noise
  Less than 10 mV rms (using the side view probe and measured using the true rms feature of the Hewlett Packard Model 34401A digital voltmeter).
  Output Impedance
  47 ohms.

  Current Output
  (one for each channel)
  Provides a current of 4-20 mA that
  represents measured voltages
  -10 kV to +10 kV.

  Ground Connections
  Four (4) banana jacks and a
  designated terminal on the output
  connector are all tied to chassis
  ground.

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GENERAL

• Dimensions
  177 mm H x 203 mm W x 228 mm D
  (7” H x 8" W x 9" D).

  Weight
  8 lbs. (3.6 kg)

  Power Supply Options
  A two (2) pin [Mate-n-Lock] connector
  or a DC power input for 24 V DC ±10%, 1.5 A supply, 3 A initial peak current.
  (An Universal Power Adapeter is optional.)

• Output Connector
  (one for each channel)
  A six position output connector
  (6P/4C) provides connections for
  the output voltage monitor, the
  current output, and a ground
  connection.

• Operating Conditions
  Temperature
  15 °C to 35 °C.
  Relative Humidity
  5% to 85%, noncondensing.

  Power ON/OFF
  Front panel switch.

  Probe Connector Locations
  Rear panel.

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CERTIFICATION

TREK, INC. certifies that each Model PD06078 is tested and calibrated to specifications using measurement equipment traceable to the National Institute of Standards and Technology or traceable to consensus standards.

Caution: These instruments are designed to make electrostatic voltage measurements only. Do not use these instruments to make measurements of “hard” voltage sources or voltage sources which can deliver currents high enough to cause harmful shocks or personal injury.

All specifications are subject to change.

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