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Model 646 for Electrostatic-Driven Handling
Trek has developed technology which advances electrostatic-driven handling in a variety of applications.
Unique aspects of the technology include customizable AC waveforms (for faster declamping) and a wafer detection system. Commercial application of this technology has resulted in a new line of E-Chuck supplies at Trek for the semiconductor industry. Model 646, a ±3kV Electrostatic Chuck Supply, is the newest model. Trek expects this technology to be of interest for applications in other industries where electrostatic handling is preferred over mechanical handling. The company welcomes inquiries from OEMs for custom designs.
Overview of Technology
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Model 50/12 High Voltage Amplifier
This new high-voltage amplifier reaches voltage levels previously not possible. Model 50/12 provides precise control of output voltages in the range of 0 to ±50 kV DC or peak AC with an output current range of 0 to ±12 mA DC or peak AC. Applications include use in dielectric studies, electrostatic deflection, plasma and many other commercial and research applications.
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Model PZD700A Piezo Driver/ Amplifier
This high-voltage DC-stable piezo driver / amplifier offers wide bandwidth and provides precise control of output voltages in one of 3 user-specified voltage ranges: 0 to ±700 V (±100 mA), 0 to +1.4 kV (±50 mA), or 0 to -1.4 kV (±50 mA).
Model PZD700A M/S has twice the current capability of the PZD700A.
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Model 10/10B-HS High-Speed High-Voltage Power Amplifier
Trek’s new Model 10/10B-HS High Speed HV Amplifier provides high performance and value to customers and their applications.
Key features include:
- High Speed of Response – slew rate greater than 700V/us
- High Peak Current – four (4) times rated current
- Large Signal Bandwidth – greater than 19.5kHz (-3dB)
- Four-Quadrant Operation
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Model 2100HF High Frequency Amplifier
This unit is a high-frequency, high-speed, wide-bandwidth amplifier for high power applications. It provides precise control of output voltages in the range of 0 to ±150 V DC or peak AC with an output current range of 0 to ±300 mA, with large signal bandwidth capabilities up to 2.6 MHz (-3 dB) and slew rates greater than 2000 V/µs.
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Model 645 Electrostatic Chuck Supply
Trek Model 645 is a software-driven amplifier (supply) for electrostatic wafer chucking (E-chucks). Various chucking and de-chucking profiles can be designed and uploaded to the Model 645 to optimize performance in an e-chuck process/facility. This versatile amplifier/supply is designed to produce accurate clamp/de-clamp waveforms developed by the process engineer in order to maximize E-chucked wafer productivity. Applicable to coloumbic and Johnsen-Rahbek electrostatic chuck technologies. Also see Model 640, Model 646
Trek 2200 Series High-Voltage 40 Watt Amplifiers
The 2200 Series of HV Amplifiers from Trek breaks new ground by offering high performance and attractive pricing. The first 3 models of this 40 Watt HV Amplifier series provide output voltage ranges of ±500 V, ±1 kV and ±2 kV. Trek stands behind this new series with a 2 year warranty. The units are also CE marked, RoHS compliant and HALT tested.
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Model 615-10 [formerly Model PM04015A] High Voltage Function Generator
Consists of a precision high voltage AC/DC generator and amplifier system with a 20 kV peak-to-peak capability.
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Electrostatics
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Model 820 Ultra High Impedance Voltmeter
[±2 kV]
Trek developed the Model 820 for voltage measurement applications that demand virtually infinite loading impedance levels which are far beyond the reach of currently available high impedance voltmeter instruments. These applications include accurate reading of electrostatic voltage levels associated with ESD sensitive components, circuits, and surfaces.
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Model 159HH
Hand-Held Charged Plate Monitor
This small, lightweight, easy-to-use hand-held charged plate monitor offers highly accurate measurements within a compact design. It is used to evaluate ionizer performance for parameters such as ion balance, decay performance, rate of charge decay, and other decay characteristics. Data is stored on the internal memory but is accessible via USB port.
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Introductory
Model 821HH
Infinitron®
Hand-Held Electrostatic Voltmeter
This next-generation contacting precision surface voltage measuring instrument provides input characteristics far beyond the limits of any currently available hand-held voltmeters. Model 821HH can easily measure the voltage level of conductive and insulative surfaces with virtually zero charge transfer to the measurement probe.
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Model 212HS Q/m Test System
This new charge-to-mass ratio test system utilizes the “draw-off” transfer method to provide repeatable, highly accurate charge measurements on toner or other powders. The unit includes a multi-functional display. Data can be stored temporarily to on-board system memory and then transferred to a personal computer via the USB terminal.
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ESD Products
Model 901HS High Sensitivity ESD Event Detector
This high-sensitivity model is ideal for CDM ESD event detection, especially in difficult-to-reach applications, and is sensitive to ESD voltage levels as low as 10 V at 50 mm.
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Model 950
Nozzle Ionizer
This compact nozzle style ionizer neutralizes charge on devices or other surfaces in a production line via ion-containing compressed-air flow. The unit is designed with a high-voltage power supply and an abnormal detection/warning display. Various nozzle designs provide air flow profiles which suit the needs of specific applications. The cartridge design enables easy cleaning and replacement.
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Model 930
Benchtop Ionizer
This tabletop ionizer is a compact unit with high ionization efficiency and ion balance for neutralizing charge. The unit’s high-performance discharge electrode and special high voltage power supply enable quick discharging. The unit’s auto-ion-balance technology generates positive(+) and negative
(-) ions to eliminate electro-static effects. The fan has adjustable air volume.
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Model 920 Combo Wrist Strap and Foot Ground Tester
The Trek Model 920 Combo Tester X3 incorporates a test circuit design that allows operators to test wrist straps and foot wear simultaneously thus eliminating the need to conduct separate tests.
