Products > Power Supplies > Electrostatic Chuck

Request a Quote for this Product

Model 645 Electrostatic Chuck Supply

Trek's Electrostatic Chuck Supply (Model 645) is a software driven, amplifier-powered, ±2kV process optimization supply used for electrostatic bipolar semiconductor wafer chucking (E-chuck) systems. The technology of Model 645 enables various chucking/de-chucking profiles to be uploaded to the unit. The supply then generates the desired waveforms and voltages which deliver optimum E-chuck performance in a given process/facility.

Model 646 is user-configurable for custom clamp and declamp sequences and wave shapes and incorporates a wafer detection system.  Demonstrated results include 3x improvement in throughput, reduction in backside (He) errors, and virtual elimination of sticky wafer or wafer popping.

Consisting of two high voltage amplifiers and control circuitry, various profiles are uploaded to the supply via the unit's user-friendly software and are then stored internally using non-volatile memory. Those profiles are used to effectively chuck and de-chuck the wafer. The unit's interactive software allows the control over parameters such as over-current, wafer-present and wafer-clamped thresholds, clamp voltage, offset voltage, and internal or external amplitude/offset control. All these features are contained within a thin 1U enclosure, freeing up valuable rack space for other instrumentation.

Additional features of Model 645 include in-process-adjustable amplitude/offset and output-control versatility. The output can be controlled by the back panel I/O, serial computer command (USB, RS232 or optional ethernet) or by the controls on the front panel.  This unit supports Coulombic and Johnson-Rahbek technologies.

Given the versatility of Model 645 and its dial-in performance, the unit can be used in multiple unique tools/processes, thus eliminating the need to specify a new supply for each unique tool/process in a facility.


Show/Hide Product Technical Information

Output

The Model 645 features two simultaneous high-voltage outputs (output Phase A, and output Phase B) which are equal in magnitude and opposite in polarity relative to an offset voltage.

Output Phasing

  • Output Voltage A
    (Reference Phase)
    0 to ±2 kV.
  • Output Voltage B
    0 to ±2 kV
    Phase B = (-1)*Phase A
  • Offset Voltage
    0 to ±2 kV.
    Phase A = Vset + Voffset ≤ 2 kV

    Phase B = Vset + (-1)* Voffset ≤ 2 kV
  • Output Waveshape
    Each DC output voltage (Phase A and Phase B) is ramped up and down with symmetrical rise and fall times, or can be programmed with the user's custom clamping and declamping waveforms.
  • Output Voltage Range
    0 to ±2 kV DC, maximum
  • Output Current Range
    0 to ±2 mA DC, 5 mA peak

Input

Setting the High Voltage Amplitude
The high voltage magnitude can be controlled either externally or internally to the unit through one of the four interface methods.

Setting the Offset Voltage
The offset voltage can be controlled either externally or internally to the unit through one of the four interface methods.

  • PRODUCT FEATURES

Clamped Wafer Detection Feature
To indicate wafer clamping events, the capacitive currents generated by a low voltage sine wave, superimposed on the Phase A and Phase B outputs, are monitored. This feature can be disabled through the program.

To indicate a no wafer, wafer present, or wafer clamped capacitance state, thresholds are set by the program.

Capacitive Load Select
The clamped capacitance state range can be selected by the program for 0 to 10, 20 or 30nF (phase to phase), depending on the system and electrostatic clamp physical configurations.

 

 

 Interlock Connector
Connections are provided to support an Interlock safety configuration. In the event that the interlock is open, the high voltage generation circuits are shut down.

Interface

A 15-Pin connector provides connections for a remote device to control and monitor the operation of the Model 645.

  • USB
  • RS-232
  • Front Panel
  • Ethernet

Digital Display
A 40x2 LCD character display is used to display various system functions such as Set Voltage, Output Voltage, Capacitance monitor, and much more.

Output Voltage Monitors
(back panel connector)

Scale Factor
1 V/200 V.

DC Accuracy
Better than 2% of full scale

Offset Voltage
Less than 10 mV

Output Noise
Less than 10 mV rms

Power ON/OFF
A two-position rocker switch.

Steady State Voltage Leakage Current Monitors

  • Scale Factor
    100 µV/1 µA.

  • DC Accuracy
    ±5 µA.

  • Output Noise
    Less than 50 mV rms.

 

GENERAL

  • Power Requirements
    24V DC, 1.7 Amps
  • Operating Conditions
  • Temperature
    0 °C to 35 °C
  • Relative Humidity
    To 85%, noncondensing
  • Dimensions
    1U Rack mount enclosure
  • Height
    1.72” [43.7mm]
  • Width
    16.6” [421.6mm]
  • Depth
    18.0” [457.2mm]
  • Panel Width
    19.0” [482.6mm]
  • Weight
    8.5 lbs. [3.86 kg]
  • High-Voltage Output Connector
    TYCO (AMP) 3 Pin LGH series
  • Ground Receptacle
    Ground stud.
  • DC Input Receptacle
    2.1mm locking DC Jack. The center contact is positive and the shell is negative. (Receptacle mates with a Switchcraft S761K plug.)
  • Interface Connector
    15-pin “D” ITT cannon.
  • Serial Connector
    9-pin “D” ITT cannon
  • USB Connector
    Standard type A

ACCESSORIES

  • Accessories Supplied
  • Operator’s manual, fuse, line cord and DC plug (Switchcraft S761K). Optional cable assembly available.

 

  • Products
  • Downloads
  • Technical Info
  • Applications
  • Sales & Support
  • News & Events
  • About Trek