Output

The Model 645 features two simultaneous high-voltage outputs (output Phase A, and output Phase B) which are equal in magnitude and opposite in polarity relative to an offset voltage.

Output Phasing

• Output Voltage A
  (Reference Phase)
  0 to ±2 kV.
• Output Voltage B
  0 to ±2 kV
  Phase B = (-1)*Phase A
• Offset Voltage
  0 to ±2 kV.
  Phase A = V_set + V_offset ≤ 2 kV
  
  Phase B = V_set + (-1)* V_offset ≤ 2 kV
• Output Waveshape
  Each DC output voltage (Phase A and Phase B) is ramped up and down with symmetrical rise and fall times, or can be programmed with the user's custom clamping and declamping waveforms.
• Output Voltage Range
  0 to ±2 kV DC, maximum
• Output Current Range
  0 to ±2 mA DC, 5 mA peak

Input

Setting the High Voltage Amplitude
The high voltage magnitude can be controlled either externally or internally to the unit through one of the four interface methods.

Setting the Offset Voltage
The offset voltage can be controlled either externally or internally to the unit through one of the four interface methods.

PERFORMANCE

• Output Noise
  Less than 50 mV rms

• PRODUCT FEATURES

  Clamped Wafer Detection Feature
  To indicate wafer clamping events, the capacitive currents generated by a low voltage sine wave, superimposed on the Phase A and Phase B outputs, are monitored. This feature can be disabled through the program.
  
  To indicate a no wafer, wafer present, or wafer clamped capacitance state, thresholds are set by the program.

  Capacitive Load Select
  The clamped capacitance state range can be selected by the program for 0 to 10, 20 or 30nF (phase to phase), depending on the system and electrostatic clamp physical configurations.

  Interlock Connector
  Connections are provided to support an Interlock safety configuration. In the event that the interlock is open, the high voltage generation circuits are shut down.

  Interface

  • A 15-Pin connector provides connections for a remote device to control and monitor the operation of the Model 645.
    
  • USB
    
  • RS-232
    
  • Front Panel
    
  • Ethernet
    

  Digital Display
  A 40x2 LCD character display is used to display various system functions such as Set Voltage, Output Voltage, Capacitance monitor, and much more.

  Output Voltage Monitors
  (back panel connector)

  • Scale Factor
    1 V/200 V.
  • DC Accuracy
    Better than 2% of full scale
  • Offset Voltage
    Less than 10 mV
  • Output Noise
    Less than 10 mV rms
  • Power ON/OFF
    A two-position rocker switch.

GENERAL

• Power Requirements
  24V DC, 1.7 Amps
• Operating Conditions
• Temperature
  0 °C to 35 °C
• Relative Humidity
  To 85%, noncondensing
• Dimensions
  1U Rack mount enclosure
• Height
  1.72” [43.7mm]
• Width
  16.6” [421.6mm]
• Depth
  18.0” [457.2mm]
• Panel Width
  19.0” [482.6mm]
• Weight
  8.5 lbs. [3.86 kg]
• High-Voltage Output Connector
  TYCO (AMP) 3 Pin LGH series
• Ground Receptacle
  Ground stud.
• DC Input Receptacle
  2.1mm locking DC Jack. The center contact is positive and the shell is negative. (Receptacle mates with a Switchcraft S761K plug.)
• Interface Connector
  15-pin “D” ITT cannon.
• Serial Connector
  9-pin “D” ITT cannon
• USB Connector
  Standard type A

ACCESSORIES

• Accessories Supplied
• Operator’s manual, fuse, line cord and DC plug (Switchcraft S761K). Optional cable assembly available.