TREK Product - Model 640 Electrostatic Chuck [ESC] Optimizer

Trek Model 640 Electrostatic Chuck [ESC] Optimizer

The Trek Model 640 Electrostatic Chuck Optimizer system allows Scientists and Engineers the freedom to experiment and optimize the waveforms and voltages required by an electrostatic chuck/clamp. The Model 640 system can be used to research, facilitate, and discover the exact waveform to minimize the de-clamp time and the precise voltage amplitude to maximize clamp force and maintain optimum wafer processing for your particular ESC operation.

This software driven test system combines two amplifiers [for two-phase voltage combinations] and a waveform generator, which can be independently programmed and configured to investigate, research, and discover the perfect power supply and waveform recipe to efficiently drive your ESC application.

This software accepts parameters through arbitrary data input, pre-programmed waveforms, or imported from your own Microsoft Excel CSV files. This method of generating waveform files expedites this process by making the ability to customize waveforms simple, yet powerful enough to generate the most complex waveforms that can be envisioned by the user. The Model 640 ESC Optimizer enables the user to build the waveform process in three stages.

The individually programmed stages include: the Clamp Signal Stage, the Processing Signal Stage (with options to “loop” the process cycle), and the Declamp Stage. All test data is recorded and presented in numerical and graphical format with a color coded display to visually cue successes or failures. The graphs can also be used to troubleshoot mechanical and electrical problems within your ESC operation.

An electrostatic voltmeter (ESVM) is contained in this system to optionally monitor any residual voltage from the clamping/de-clamping process.

These waveforms can then be used to speci fy operation parameters to build OEM amplifiers to meet the needs of your individual process. Once a finalized recipe is determined for optimizing your process, a permanent ESC power supply can be ordered for your system to ensure continuous, stable and consistent ESC processing.

Electrostatic Chuck Power Supplies [ E-Chuck ] (more info) Trek has been providing High Voltage power supply solutions for Bipolar Electrostatic Chuck Supplies (E-chuck supplies, ESC supplies) in the semiconductor industry for decades.

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PERFORMANCE (each phase)

Large Signal Bandwidth (1% distortion)
DC to greater than 1.2 kHz.

Small Signal Bandwidth (-3 dB)
DC to greater than 5 kHz.

Slew Rate (10% to 90%, typical)
Greater than 15 V/ms.

Settling Time (to 1%)
Less than 300 ms for 0 to 2 kV step.

DC Accuracy
Better than 0.1% of full scale.

Offset Voltage
Less than 500 mV.

Output Noise
Less than 100 mV rms (measured using the true rms feature of the Hewlett Packard Model 34401A digital multimeter).

Drift with Time
Less than 100 ppm/hour, noncumulative.

Drift with Temperature
Less than 350 ppm/°C.

Phase A & B Outputs

Phase A Output Voltage Range
0 to ±2 kV DC or peak AC (4 kV p-p).

Phase A Output Current Range
0 to ±5 mA DC or peak AC (10 mA p-p).

Phase B Output Voltage Range
0 to ±2 kV DC or peak AC (4 kV p-p).

Phase B Output Current Range
0 to ±5 mA DC or peak AC (10 mA p-p).

GENERAL

Dimensions
193.2 mm H x 440.9 mm W x 447 mm D
(7.6" H x 17.4" W x 17.6" D).

Weight
11.3 kg (25 lb).

High-Voltage Output Connector
Tyco high-voltage connector.

AC Line Receptacle
Standard three-prong AC line connector.

Line Voltage
Factory set for one of two ranges: 90 to 127 V AC or 180 to 250 V AC.

PRODUCT FEATURES (each phase)

Front Panel Display
A 3½ digit LED display.
Voltage Range
0 to ±1999 V.
Voltage Resolution
1 V.
Zero Offset
±1 count, referred to the voltage monitor.

Voltage Monitor
A buffered output providing a low-voltage representation of the high voltage output.
Scale Factor
1 V/200 V.
DC Accuracy
Better than 0.1% of full scale. (May degrade to 0.6% in the presence of RF fields up to 3 V/m.)
Offset Voltage
Less than 5 mV.
Output Noise
Less than 10 mV rms (measured using the true rms feature of the Hewlett Packard Model 34401A digital multimeter).
Output Impedance
Less than 0.1 Ω.

Current Monitor
A buffered output providing a low-voltage representation of the load current.
Scale Factor
1 V/mA.
DC Accuracy
Better than 1% of full scale.
Offset Voltage
Less than 5 mV.
Output Noise
Less than 10 mV rms (measured using the true rms feature of the Hewlett Packard Model 34401A digital multimeter).
Bandwidth (-3db)
DC to greater than 800 Hz.
Output Impedance
Less than 0.1 Ω.

Waveform Generator

Arbitrary Waveform Generator
Two (2) channels of Analog output.

Resolution
16 bits.

Samples/second
250 k.

Electrostatic Voltmeter [ESVM]

Measurement Range

0 to ±2 kV DC or peak AC
Measurement Accuracy at the Voltage Monitor
Better than ±0.05% of full scale.
Measurement Accuracy at the Voltage Display
Better than ±0.1% of full scale ±1 count, referred to the voltage
monitor.

Speed of Response (10% to 90%)
Less than 100 us for a 1 kV step.

ESVM Voltage Monitor Output
A buffered output providing a low-voltage replica of the measured voltage.
Scale Factor
1 V/200 V.
Offset Voltage
Less than 5 mV.
Output Noise
Less than 10 mV rms (measured with the true rms feature of the Hewlett Packard Model 34401A digital multimeter).
Output Current Limit
±10 mA.
Output Impedance
Less than 0.1 Ω.

Additional Features

Computer Interface
A computer program is provided to take CSV files, containing waveform information, and outputting the waveforms to the High Voltage Amplifiers.

USB Connector
Allows data transfer to and from a
PC computer.

Current Limit Indicator
(I for each phase)
A front panel indicator illuminates when the current exceeds ±5 mA.

HV ON Indicator
A front panel LED illuminates when the high-voltage is on.

CERTIFICATION

TREK, INC. certifies that each Model 640 system is tested and calibrated to specifications using measurement equipment traceable to the National Institute of Standards and Technology or traceable to consensus standards.

Low-Voltage Safety Compliance

Installation Category
CAT II: Local level mains, appliances, portable equipment.
Pollution Category
Degree 1: Operate in environments where no pollution or only dry, nonconductive pollution occurs.

All specifications are with no load unless otherwise noted.
All specifications are subject to change.

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