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Model 323 High-Sensitivity, DC Stable ESVM
The Trek Model 323 Electrostatic Voltmeter performs high voltage resolution, noncontacting, DC stable surface voltage measurements using a technique which maintains high measurement accuracy over a wide range of sensor probe to measured surface spacings. This makes the Trek Model 323 ideal for semiconductor wafer surface voltage measurement as well as other critical applications such as surface work function measurements and disk drive assembly charge accumulation measurements.
Using a variety of user specified vacuum compatible sensor probe configurations, such as side view, end view, round or square body types, the Trek Model 323 features a 3½ digit LED display while providing analog outputs for external monitoring at various scale factors. The analog outputs can be used to control an ionization system to enable measured surface discharging.
The Trek Model 323 employs the world renown Trek low impedance sensor probe design which assures better than 0.05% measurement accuracy in the range of 0 to ±100 volts over wide variations of temperature and humidity.
The Model 323 is specifically designed for high sensitivity applications and has adjustments to compensate for many sensitive testing conditions. The response Speed control adjusts the speed/noise tradeoff of the AC response. The Drift/Spacing Null Adjustment minimizes the variation in zero offset voltage as the probe to test surface spacing changes.
The front panel has an easy to read 3½ digit LED display. The detected output voltage can be monitored through a 1:1 voltage monitor output and a switch selectable ratio of 10:1 or 20:1 voltage monitor output.
The Model 323 is used for a variety of electrostatic applications including materials evaluation, electret studies, charge accumulation on disk drive assemblies, and other extremely sensitive ESD sensitive components.
EPA Regulation 40 C.F.R. 86.1312-2007
The Model 323 meets the requirements described for an electrostatic monitor under the Environmental Protection Agency (EPA); Title 40 Part 86 – Control of Emissions from New and In-Use Highway Vehicles and Engines. Specifically 40 C.F.R. 86.1312-2007 - Filter stabilization and microbalance workstation environmental conditions, microbalance specifications, and particulate matter filter handling and weighing procedures.
This EPA regulation for emission control describes the procedure for measuring particulates from vehicle emissions that are accumulated on a filter for weighing. During the weighing process static neutralizers such as Po-210 sources are used to neutralize any charge build up on the filter that could interfere with the filter weighing. To insure the Po-210 sources (or other static neutralizers) are operating properly a static monitor is used to measure residual charge on the filter before weighing. Static charge on the filter needs to be less than ±2V DC which requires the use of a static measuring device having sufficient low voltage resolution, low zero offset, and good sensitivity. The Model 323 with 0.01V of resolution and 5mV of sensitivity meets these requirements to insure accurate and repeatable measurements required by EPA regulation 40 C.F.R. 86.1312-2007.
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