Semiconductor Applications

Trek amplifiers are used for ion and electron beam deflection/steering during semiconductor wafer processing. They are also used in electrostatic and Johnsen-Rahbeck wafer clamping.

Electrostatic Deflection of Charged Particle Beams
Trek’s high voltage amplifiers are used to sweep the voltage applied to electrostatic deflection plates to precisely control the position of the charged particle beam strike on semiconductor devices. 
Trek Product: 609E-6, 10/10B-HS, 20/20C, 30/20A

Corona Charging Supplies
Trek high voltage power supplies/amplifiers are used to control the voltage or current applied to corona generators used to apply a precise amount of charge to semiconductor wafers or flat panel displays.
Trek Product: 610E

Wafer and Thin Film Potential Measurements
Trek’s non-contacting electrostatic voltmeters are used to precisely measure the surface potential of semiconductor wafers and the voltage, which corresponds to the charge level of thin films.
Trek Product: 325, 323, 347

Electrostatic Chuck (E-Chuck) Power Supplies
Trek amplifiers are used to apply AC and DC voltages to the electrode(s) of coloumbic or Johnsen-Rahbek electrostatic chucks which are used to clamp semiconductor wafers or flat panel displays during device processing and handling operations.
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Trek Product: 640, 645, 646, 677B, 609E-6

Ion Source Power Supplies
Trek’s high voltage power supplies/amplifiers are used to control the voltage level of electrodes in ion sources.  The four quadrant capability allows very stable control of the output voltage level with these active loads, and an ability to quickly ramp (up and down) the voltage level.
Trek Product: PZD700A, 623B, 609E-6, 609B-3, 10/10B-HS PZD2000A, 2200 Series

Work Function Measurements
Trek’s non-contacting electrostatic voltmeters are used to precisely measure the work function (contact potential) associated with conducting surfaces. 
Trek Product: 320C, 325

Custom Designs

Trek designs application-specific solutions to meet, if not exceed, individual customer requirements.
 
Contact Trek for assistance: sales@trekinc.com

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