Electrostatic-Driven Handling Technology
Trek has developed technology which advances electrostatic-driven handling in a variety of applications.
Unique aspects of the technology include customizable AC waveforms (for faster declamping) and a wafer detection system.
Commercial application of this technology has resulted in a new line of E-Chuck supplies at Trek for the semiconductor industry.
Trek expects this technology to be of interest for applications in other industries where electrostatic handling is preferred over mechanical handling.
The company welcomes inquiries from OEMs for custom designs utilizing Trek’s technology.
E-Chuck Supplies for Semiconductor Industry
Trek has been providing high voltage power supply solutions for bipolar electrostatic chuck supplies (E-chuck supplies, ESC supplies) in the semiconductor industry for decades.
The company’s newest ESC supply product line utilizes novel Trek technology which delivers numerous benefits:
For more information about Trek’s E-Chuck supplies
Trek’s video demonstrates two applications of Trek’s electrostatic clamping technology.
Please note that the wafer detection indicator appears in the upper right corner of the display on the front panel:
WC = wafer present and clamped
WP = wafer present but not clamped
NW = wafer not present