Electrostatic Chuck Power Supplies [ E-Chuck ]

Trek has been providing High Voltage power supply solutions for Bipolar Electrostatic Chuck Supplies (E-chuck supplies, ESC supplies) in the semiconductor industry for decades. The company continues to make advancements in Bi-polar E-chuck supply solutions.

Trek announces it has designed an E-chuck supply with a unique wafer-presence-detection feature. This feature allows the user to monitor the wafer clamping status throughout the process, thereby increasing awareness of process capability and opportunities for process improvement.

The detection window on Trek’s E-chuck supply indicates one of three ESC/wafer conditions:

1) the wafer is present or not present,
2) the wafer is present but not clamped, or
3) the wafer is present and clamped. 

Additionally, Trek's bi-polar capabilities – developed in connection with the company’s High Voltage Amplifier technology – enable positive de-clamping. All these capabilities combined with a new look, on-board micro-controller and user-friendly interface make Trek the choice in ESC supplies.

Trek’s ESC supply was demonstrated at SEMICON West 2008. 

Wafer not present...

Wafer present, not clamped...

Wafer present and clamped....