Also Available: Model 640 Electrostatic Chuck [ESC] Optimizer. A software-driven, amplifier-powered, process optimization tool for E-chucks. It enables various clamp/process/declamp profiles to be designed, evaluated and captured (graphically), thereby indicating the specific waveforms and voltages which deliver optimum performance in a given facility. Trek can provide standard or custom ESC power supplies to consistently deliver that specific waveform/voltage process profile on the production floor.
Electrostatic Chuck Power Supplies [ E-Chuck ]
The detection window on Trek’s E-chuck supply indicates one of three ESC/wafer conditions:
1) the wafer is present or not present,
2) the wafer is present but not clamped, or
3) the wafer is present and clamped.
Additionally, Trek's bi-polar capabilities – developed in connection with the company’s High Voltage Amplifier technology – enable positive de-clamping. All these capabilities combined with a new look, on-board micro-controller and user-friendly interface make Trek the choice in ESC supplies.
Trek’s ESC supply was demonstrated at SEMICON West 2008.
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Wafer not present...
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Wafer present and clamped....